Materials Science Program seminar by Jeffrey Elam, Energy Systems Div., Argonne Nat'l Lab
Beyond A/B/A/B: Unorthodox Pulse Sequences in Atomic Layer Deposition
Thursday, December 13, 2012
In this seminar Elam will discuss how enhanced control in ALD synthesis can be achieved by modifying the typical sequence to incorporate an additional chemical species (ABCABC…). He will review four recent developments at Argonne that utilize unorthodox ALD pulse sequences. The first is “stripe coating,” a method that allows materials to be deposited at controlled depth locations within porous substrates to achieve patterned growth inside of nanopores.